Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
In this paper we present a non-linear control scheme for high-speed nanopositioning based on impulsive control. Unlike in the case of a linear feedback controller, the controller states are altered in a discontinuous manner at specific instances in time. Using this technique, it is possible to simultaneously achieve good tracking performance, disturbance rejection and tolerance to measurement noise. Impulsive control is demonstrated experimentally on an atomic force microscope. A significant improvement in tracking performance is demonstrated. © 2011 IOP Publishing Ltd.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Revanth Kodoru, Atanu Saha, et al.
arXiv
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997