Robert W. Keyes
Physical Review B
A high surface concentration layer is essential for obtaining good ohmic contact on GaAs devices. Zn diffusion in GaAs using Zn3As2, ZnAs2, Zn3As2 + ZnAs2, and ZnAs2 + As as diffusion sources at low temperatures (600°-730'C) has been studied. The resulting surfaces were reproducible and undamaged, and the surface concentrations were in the 1020 cm-3 range. © 1976, The Electrochemical Society, Inc. All rights reserved.
Robert W. Keyes
Physical Review B
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SPIE Advanced Lithography 2007
K.N. Tu
Materials Science and Engineering: A
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Macromolecules