High-speed rotary-motion feedthrough suitable for UHV applications

T. Engel

doi:10.1063/1.1136555

Review of Scientific Instruments

Paper

01 Dec 1981

High-speed rotary-motion feedthrough suitable for UHV applications

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Abstract

A rotary-motion feedthrough suitable for use in UHV at frequencies between 1200-15,000 rpm is described. The outgassing rate in operation is less than 2×10-8 torr l/s.

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Abstract

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