Conference paper
Perfluoropolyethers as novel materials for soft lithography
Jason P. Rolland, Eric C. Hagberg, et al.
Microlithography 2005
Making a good impression: Photocurable, liquid perfluoropolyethers (PFPEs) are ideal materials for high-resolution (< 100 nm) pattern transfer and imprint lithographic processes (see pictures). PFPEs possess attributes of both elastomers and rigid materials, exhibit a remarkably low surface energy, mold extremely small features with high fidelity, resist swelling by organic solvents, and endure repetitive molding procedures.
Jason P. Rolland, Eric C. Hagberg, et al.
Microlithography 2005
Erik C. Hagberg, Mark W. Hart, et al.
Journal of Inorganic and Organometallic Polymers and Materials
Timothy A. Von Werne, David S. Germack, et al.
JACS
Erik C. Hagberg, J. Campbell Scott, et al.
Small