Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
High resolution electron energy loss study of AlxGax_xAs mixed crystals
Abstract
The surface optical phonon spectra of AlxGa1As mixed crystals have been measured by high resolution electron energy loss spectroscopy (HREELS). Two modes (Al-As and Ga-As types, respectively) were observed whose frequencies shifted almost linearly with aluminum concentration. The relative intensities of these modes are analyzed. Comparison is made with Raman scattering measurements and theoretical calculations. © 1986, American Vacuum Society. All rights reserved.