Kangguo Cheng, A. Khakifirooz, et al.
VLSI Technology 2011
We report stand-alone heterojunction (HJ) solar cells with conversion efficiencies of 5.9 and 7.2 on n-type and p-type crystalline germanium (c-Ge) substrates, respectively. The emitter of the HJ solar cells is formed by growing thin layers of highly doped hydrogenated microcrystalline silicon using plasma-enhanced chemical vapor deposition at temperatures close to 200 °C. The conversion efficiencies of the HJ solar cells are well-comparable with conventional devices fabricated at temperatures as high as 600 °C. We also study the surface passivation of c-Ge with hydrogenated amorphous and microcrystalline Si and correlate the passivation quality with the electrical performance of the HJ solar cells. © 2012 American Institute of Physics.
Kangguo Cheng, A. Khakifirooz, et al.
VLSI Technology 2011
J.C. Sturm, Y. Huang, et al.
ULIS 2011
Ali Khakifirooz, Kangguo Cheng, et al.
ISSCC 2010
Bahman Hekmatshoar, Ali Afzali-Ardakani
IEDM 2014