High-dielectric constant insulators and the AMLCD process: is amorphous BST a candidate?

Abstract

Evidence is given, indicating that a-BST form solgel is not an ideal candidate for use in the AMLCD process. It is shown that this solgel is unsuitable for devices where threshold shift is a major consideration because of its strong oxidation of common AMLCD electrode materials, large leakage current density, and polarizable behavior.