Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We study a model fluid with classical translational degrees of freedom and internal quantum states in two spatial dimensions. The path-integral Monte Carlo and the Gibbs-ensemble Monte Carlo techniques are combined to investigate the liquid-gas coexistence region in this mixed quantum-classical system. A comparison with the phase diagram obtained in the canonical ensemble is also presented. © 1995 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R. Ghez, J.S. Lew
Journal of Crystal Growth
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials