Revanth Kodoru, Atanu Saha, et al.
arXiv
Revanth Kodoru, Atanu Saha, et al.
arXiv
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS