J.H. Stathis
Physical Review Letters
Using electron spin resonance, a single defect (called Pb0) is observed at the Si(111)/SiO2 interface, whereas two different defects (called Pb0 and Pb1) are observed at the Si(100)/SiO 2 interface. While the structure of the Pb center is well established as a silicon dangling bond, the identities of Pb0 and Pb1 are controversial. We have discovered that under processing conditions where the hydrogen passivation reaction Si·+H 0→Si-H passivates the Pb center at the Si(111)/SiO2 interface, the Pb1 center is likewise passivated but the Pb0 center is not. We conclude that the structure of Pb1 is a silicon dangling bond similar to the Pb on (111), and that the Pb0 is a fundamentally different defect, in agreement with recent theoretical calculations.
J.H. Stathis
Physical Review Letters
L. Dori, J.H. Stathis, et al.
Journal of Applied Physics
E. Cartier, Andreas Kerber, et al.
IEDM 2011
S. Lombardo, J.H. Stathis, et al.
Microelectronics Reliability