Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The transformation of cleaved Si(111)2×1 surfaces into apparent 1×1, 5×5, and 7×7 structures has been studied with the scanning tunneling microscope. Two reaction paths are identified, one proceeding through a disordered adatom arrangement into the 7×7 structure, and the other proceeding directly from 2×1 into the 5×5 structure. Near a nucleation site (step or domain boundary), the first path is favored due to the abundance of adatoms on the surface, and far from a nucleation site the second path dominates. © 1990 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A. Krol, C.J. Sher, et al.
Surface Science