K. Pennington
IEEE JQE
Defect enhancement in semiconductor wafers is shown to be possible by spatial frequency filtering-without the necessity for filter alignment. The technique depends on the wafer being sufficiently periodic. Coherent optical and digital computer simulation results are presented. © 1971 Optical Society of America.
K. Pennington
IEEE JQE
K. Pennington, P.M. Will
Optics Communications
K. Pennington, E. Simonyi, et al.
SPIE OE/LASE 1989
K. Pennington, J.S. Harper
Applied Optics