William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Lawrence Suchow, Norman R. Stemple
JES
Imran Nasim, Melanie Weber
SCML 2024
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics