Fabrication of multilayered nanoporous poly(methyl silsesquioxane)

Abstract

The fabrication of multilayered nanoporous poly(methyl silsesquioxane) (PMSSQ) was studied. The morphology and dimensions of the pores were determined by the interaction between the porogen and the inorganic polymers. It was found that the nanoporous PMSSQ films were optically homogeneous because the pores were much smaller than the wavelength of the visible light.