Conference paper
Soft x-ray diffraction of striated muscle
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
This paper presents the fabrication and characteristics of a magnetically actuated micromechanical scanner/stage with five degrees of freedom (X, Y, Z, and tilt about the X and Y axes) intended for use as a compact positioning device in parallel scanning probe applications. The entire scanner has a volume of 30×30×2 mm3. It shows a DC displacement amplitude to drive current ratio of 330 nm/mA along the X and Y axes, of 50 nm/mA along the Z axis, and has a resonant frequency in the X/Y plane of 61 Hz.
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
R.W. Gammon, E. Courtens, et al.
Physical Review B
Frank Stem
C R C Critical Reviews in Solid State Sciences
Ronald Troutman
Synthetic Metals