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Publication
IEEE International SOI Conference 2008
Conference paper
Extending dual stress liner process to high performance 32nm node SOI CMOS manufacturing
Abstract
Dual stress liner process for high performance SOI CMOS technology at 32nm technology node is improved through the use of dep-etch-dep, etch back, and spacer removal techniques. The stress benefit of DSL is preserved with improved gap fill for the manufacturing of sub-32nm gate length transistors. ©2008 IEEE.