Experimental design issues in simulation wtiti examples from semicondiljctor manufacturing

Abstract

The contents of this paper reflect a portion c)f the conference tutorial on experimental design and simulation, In this paper we primarily focus on two level fractional factorial designs and theix application to a discrete event simulation model of semicorlductor manufacturing logistics, In the tutorial wc will discuss a wider range of experimental design issues. However, in all cases, examples will be given of their application to the same semiconductor manufacturing model.