Excimer laser projection lithography

K. Jain, B.J. Lin

Proceedings of SPIE 1989

G.C. Bjorklund, K. Jain, et al.

Applied Physics Letters

R.J. Twieg, K. Jain, et al.

CLEO 1983

K. Jain, J.I. Crowley, et al.

Optics and Laser Technology