William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997