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Journal of Physics D: Applied Physics
A study of the etching and deposition of plasma perfluoropolymer thin films has been carried out by using quartz-crystal microbalance methods for a range of feed gas mixtures.
E. Occhiello, F. Garbassi, et al.
Journal of Physics D: Applied Physics
K. Köhler, D.E. Horne, et al.
Journal of Applied Physics
J.W. Coburn
Symposium on Process Physics and Modeling in Semiconductor Technology 1990
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Applications of Surface Science