Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
In Kohn-Sham density functional theory, equations for occupied orbital functions of a model state are derived from the exact ground-state energy functional of Hohenberg and Kohn. The exchange-correlation potential in these exact Kohn-Sham equations is commonly assumed to be a local potential function rather than a more general linear operator. This assumption is tested and shown to fail for the exchange potential in a Hartree-Fock model for atoms, for which accurate solutions are known.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
David Cash, Dennis Hofheinz, et al.
Journal of Cryptology
Satoshi Hada
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences