Dielectric anisotropy of BPDA-PDA polyimide and its effect on electrical characteristics of interconnects

A. Deutsch; M. Swaminathan; M. Ree; C. Surovic; G. Arjavalingam; K. Prasad; D. McHerron; M. McAlister; G.V. Kopcsay; A.P. Giri; E.D. Perfecto; G.E. White

doi:10.1109/EPEP.1993.394567

Publication

IEEE Topical Meeting EPEPS 1993

Conference paper

Dielectric anisotropy of BPDA-PDA polyimide and its effect on electrical characteristics of interconnects

IEEE Topical Meeting EPEPS 1993

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Abstract

The dielectric anisotropy of BPDA-PDA polyimide is characterized in a multi-layer thin-film structure representative of its actual use. The results are verified through their effect on signal propagation and crosstalk.

Date

20 Oct 1993

Publication

IEEE Topical Meeting EPEPS 1993

Authors

IBM-affiliated at time of publication

Abstract

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