P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Model experiments have been used to study the cross-linking reactions that are operative in a new negative-tone resist system based on photoacid-catalyzed electrophilic aromatic substitution of copolymers containing benzyl acetate pendant groups. NMR monitoring of the formation of diphenylmethane units in the acid-catalyzed reaction of various benzyl acetates with themselves and with activated aromatic compounds such as 4-isopropylphenol gave insight into the cross-linking reaction. The influence of the leaving group, stabilizing substituents, and nucleophile on the overall process and the possible formation of O-alkylated products or intermediates were studied. © 1991, American Chemical Society. All rights reserved.
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
P. Alnot, D.J. Auerbach, et al.
Surface Science
T.N. Morgan
Semiconductor Science and Technology
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics