Deposition of platinum from Pt(PF₃)₄ on atomically clean platinum surfaces

Abstract

The surface reactions of Pt(PF3)4 on Pt(111) and polycrystalline platinum have been examined under ultra-high vacuum conditions using Auger electron spectroscopy, temperature programmed desorption and secondary ion mass spectrometry techniques. For both surfaces, the dissociation of Pt(PF3)4 on platinum takes place below 500 K and gives rise to an intermediate state in which PF3 is chemisorbed on the platinum surface. On Pt(111) single crystal surface, a condensed state of Pt(PF3)4 is observed at 170 K for high coverage dosing. On a polycrystalline Pt surface, a desorption state of the reactant occurs at very high temperature, presumably from a recombination reaction of chemisorbed surface fragments. © 1992.