J.S. Washington, E. Joseph, et al.
MRS Spring Meeting 2009
The crystallization times of Ge-Te phase change materials with variable Ge concentrations (29.5-72.4 at. %) were studied. A very strong dependence of the crystallization time on the composition for as-deposited, amorphous films was confirmed, with a minimum for the stoichiometric composition GeTe. The dependence is weaker for melt-quenched, amorphous material and crystallization times are between one to almost four orders of magnitude shorter than for as-deposited materials. This is promising for applications because recrystallization from the melt-quenched phase is the relevant process for optical and solid state memory, and fast crystallization and weak dependence on compositional variations are desirable. © 2009 American Institute of Physics.
J.S. Washington, E. Joseph, et al.
MRS Spring Meeting 2009
Y.H. Shih, J.Y. Wu, et al.
IEDM 2008
Sangbum Kim, Pei-Ying Du, et al.
VLSI-TSA 2012
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IEDM 2007