Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper gives a detailed overview of the approach to cross-organizational workflow management developed in the CrossFlow project. CrossFlow is a European research project aiming at the support of cross-organizational workflows in dynamic virtual enterprises. The cooperation in these virtual enterprises is based on dynamic service outsourcing specified in electronic contracts. Service enactment is performed by dynamically linking the workflow management infrastructures of the involved organizations. Extended service enactment support is provided in the form of cross-organizational transaction management and process control, advanced quality of service monitoring, and support for high-level flexibility in service enactment. CrossFlow technology is realized on top of a commercial workflow management platform and applied in two real-world scenarios in the contexts of a logistics and an insurance company.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Rolf Clauberg
IBM J. Res. Dev
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Fan Zhang, Junwei Cao, et al.
IEEE TETC