Conference paper
Porous ILD process development for sub 100nm integration
K. Malone, S.T. Chen, et al.
ADMETA 2003
Surface tunability was observed for polystyrene-polymethyl methacrylate and polystyrene-HEMA brush surfaces, where the brushes were produced by the grafting to' and grafting from' approaches, respectively. Through both of these approaches, random copolymer brush surfaces offer an effective and versatile means in which surfaces with a wide variety of properties can be produced and finely tuned.
K. Malone, S.T. Chen, et al.
ADMETA 2003
A.M. Mayes, T.P. Russell, et al.
Macromolecules
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Journal of Applied Polymer Science
P. Bassereau, D. Brodbreck, et al.
Physical Review Letters