Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Let P be (the boundary of) a simple polygon with n vertices. For a vertex p of P, let φ{symbol}(p) be the set of points on P that are farthest from p, where the distance between two points is the length of the (Euclidean) shortest path that connects them without intersecting the interior of P. In this paper, we present an O(n log n) algorithm to compute a member of φ{symbol}(p) for every vertex p of P. As a corollary, the external diameter of P can also be computed in the same time. © 1991.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989
Daniel J. Costello Jr., Pierre R. Chevillat, et al.
ISIT 1997
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992