Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
K.A. Chao
Physical Review B
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007