Zohar Feldman, Avishai Mandelbaum
WSC 2010
The chemical amplification concept was invented at IBM Research and quickly brought into use in the production of dynamic random access memory devices in the company. It has remained as an important foundation for the design of advanced resist systems for use in short-wavelength (<300-nm) lithographic technologies.
Zohar Feldman, Avishai Mandelbaum
WSC 2010
Erich P. Stuntebeck, John S. Davis II, et al.
HotMobile 2008
Alfonso P. Cardenas, Larry F. Bowman, et al.
ACM Annual Conference 1975
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009