Raymond Wu, Jie Lu
ITA Conference 2007
The chemical amplification concept was invented at IBM Research and quickly brought into use in the production of dynamic random access memory devices in the company. It has remained as an important foundation for the design of advanced resist systems for use in short-wavelength (<300-nm) lithographic technologies.
Raymond Wu, Jie Lu
ITA Conference 2007
Kaoutar El Maghraoui, Gokul Kandiraju, et al.
WOSP/SIPEW 2010
Liat Ein-Dor, Y. Goldschmidt, et al.
IBM J. Res. Dev
Michael C. McCord, Violetta Cavalli-Sforza
ACL 2007