Atomic absorption and emission in laser produced plasmas

P. Martensson, R.M. Feenstra

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

A. Gangulee, F.M. D'Heurle

Thin Solid Films

E. Babich, J. Paraszczak, et al.

Microelectronic Engineering

J. Tersoff

Applied Surface Science