Annealing of residual stress in silicon monoxide films [1]

Paper

20 Nov 2002

Abstract

No abstract available.

Paper

J.R. Priest, H.L. Caswell, et al.

Journal of Applied Physics

Paper

R.J. Von Gutfeld, H.L. Caswell

Applied Physics Letters

Paper

H.L. Caswell

Solid State Communications

Paper

H.L. Caswell, Y. Budo

Journal of Applied Physics