J.P. Chen, G. Klaerner, et al.
American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
J.P. Chen, G. Klaerner, et al.
American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
R.D. Miller, J.-I. Lee, et al.
American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
R.D. Miller, B.L. Farmer, et al.
JACS
Thomas I. Wallow, P.J. Brock, et al.
SPIE Advances in Resist Technology and Processing 1999