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Polysilanes. Radiation sensitive materials for microlithography
R.D. Miller
ACS Division of Polymer Chemistry Washington DC Meeting 1990
R.D. Miller
ACS Division of Polymer Chemistry Washington DC Meeting 1990
R.D. Miller, G.N. Fickes
Journal of Polymer Science Part A: Polymer Chemistry
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Physical Review B
D.A.Mcl. Smith, S.A. Williams, et al.
SPIE Optics Quebec 1993