Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
The fabrication and application of photoplastic scanning force microscopy (SFM) probes has been demonstrated. Simple molding and replication techniques, inexpensive photoplastic material, reusable molds and several layers per probe make it a very attractive for fabricating low-cost photoplastic SFM probes. The good homogeneity of the cantilevers within a cassette and among cassettes over a 4 in. wafer coupled with an appropriate holder provides ease of operation.
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals