Advances in Membrane Probe Technology

Abstract

Membrane probe technology represents a significant advance in wafer probing technology over conventional needletype probe cards. We describe several improvements to membrane probes that have been made since their introduction. These include the use of 2-sided metal patterning on the membrane, the introduction of vias thut can be placed anywhere on the membrane, an improved lower inductance power distribution geometry, a process to attach decoupling component!; directly on the membrane within millimeters of the chip pads, an improved force-delivery mechanism and improved membrane-to-PC board microstrip transition. Measured test results on a 512Kb SRAM operating at 200 MHz arc? presented and compared to needle probe results.