Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
An adaptive blind signal separation filter is proposed using a risk-sensitive criterion framework. This criterion adopts an exponential type function. Hence, the proposed criterion varies the consideration weight of an adaptation quantity depending on errors in the estimates: the adaptation is accelerated when the estimation error is large, and unnecessary acceleration of the adaptation does not occur close to convergence. In addition, since the algorithm derivation process relates to an H∞ filtering, the derived algorithm has robustness to perturbations or estimation errors. Hence, this method converges faster than conventional least squares methods. Such effectiveness of the new algorithm is demonstrated by simulation.
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
Hang-Yip Liu, Steffen Schulze, et al.
Proceedings of SPIE - The International Society for Optical Engineering
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