Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Measurements of the absolute Raman cross sections for trans-(CH)x are reported. The results have been analyzed to study the contribution of hot luminescence to the inelastically scattered light spectrum. The magnitude and frequency dependence of the absolute scattering cross sections are consistent with hot luminescence being the dominant process. To determine the contribution of static resonance effects (i.e., short chains) to the Raman line shape, we present sliced excitation profiles. We find no evidence for the resonance behavior of short chains. © 1983 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
J. Tersoff
Applied Surface Science