H.Y. Cheh, J. Dukovic, et al.
JES
The design, fabrication and output characteristics of a thin film Permalloy magnetoresistive magnetic field sensor in a balanced bridge configuration are described. The bridge elements consist of two magnetostatically coupled Permalloy films (100 to 500 A°) separated by a thin film titanium spacer (100 to 1,000 A°). When this bridge is integrated with electrically isolated overlay conductors, the resulting device is ideally suited to sense currents in power supply applications over a 0 to 100 MHz frequency range with negligible dc offset. Devices with 35 mV peak outputs optimized to sense 50, 250 and 500 mA peak currents have been implemented and tested. Copyright © 1976 by The Institute of Electrical and Electronics Engineers, Inc.
H.Y. Cheh, J. Dukovic, et al.
JES
H. Deligianni, L. Romankiw
ECS Meeting 1989
C. Clerc, M. Datta, et al.
Symposium on Patterning Science and Technology 1989
D.A. Thompson, L. Romankiw, et al.
IEEE Transactions on Magnetics