Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
No abstract available.
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures