Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
In this work we describe the design, fabrication, and testing of a mass-balanced planar x/y-scanner designed for parallel-probe data storage applications. The scanner is actuated by comb drives, whose finger shape is improved using finite-element analysis to increase the force output. A mass-balancing concept is used for in-plane shock resistance; in the out-of-plane direction passive shock resistance is achieved using 1:40 aspect-ratio springs that are fabricated by deep reactive ion etching through the full thickness of a 400 μm wafer. A prototype device is presented and its performance is reported. © 2008 Elsevier B.V. All rights reserved.
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
A. Reisman, M. Berkenblit, et al.
JES
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009