Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
This report deals with the numerical evaluation of a class of functions of a complex variable that can be represented as Stielt] es transforms of nonnegative real functions. The considered class of functions contains, among others, the confluent hypergeometric functions of Whittaker and the Bessel functions. The method makes it possible, in principle, to compute the values of the function with an arbitrarily small error, using one and the same algorithm in whole complex plane cut along the negative real axis. Detailed numerical data are given for the application of the algorithm to the modified Bessel function K0(z). © 1967, AMS Publisher, All rights reserved.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
Hannaneh Hajishirzi, Julia Hockenmaier, et al.
UAI 2011
R.A. Brualdi, A.J. Hoffman
Linear Algebra and Its Applications