Aerosol problems in clean technologies for microelectronics
- Douglas W. Cooper
- 1991
- Journal of Aerosol Science
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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6 results at Journal of Aerosol Science
Applying a simple statistical test to compare two different particle counts
- Douglas W. Cooper
- 1991
- Journal of Aerosol Science
The inversion matrix and error estimation in data inversion: Application to diffusion battery measurements
- Douglas W. Cooper
- Jin Jwang Wu
- 1990
- Journal of Aerosol Science
Suppression of particle generation in a modified clean room corona air ionizer
- Philip C.D. Hobbs
- Vaughn P. Gross
- et al.
- 1990
- Journal of Aerosol Science
Evaluation of aerosol deconvolution algorithms for determining submicron particle size distributions with diffusion battery and condensation nucleus counter
- Jin Jwang Wu
- Douglas W. Cooper
- et al.
- 1989
- Journal of Aerosol Science
The effects of electrostatic and inertial forces on the diffusive deposition of small particles onto large disks: Viscous axisymmetric stagnation point flow approximations
- Michael H. Peters
- Douglas W. Cooper
- et al.
- 1989
- Journal of Aerosol Science