Design driven patterning optimizations for low K 1 lithography
- Kanak Agarwal
- Shayak Banerjee
- 2012
- ICICDT 2012
Publications
3 results at ICICDT 2012
Performance analysis and modeling of deep trench decoupling capacitor for 32 nm high-performance SOI processors and beyond
- Balaji Jayaraman
- Sneha Gupta
- et al.
- 2012
- ICICDT 2012
Spatial variation decomposition via sparse regression
- Wangyang Zhang
- Karthik Balakrishnan
- et al.
- 2012
- ICICDT 2012