Publications

2 results at SPIE Micromachining and Microfabrication 1997

Microfabrication by through-mask electrochemical micromachining
- - Madhav Datta
- 1997
- SPIE Micromachining and Microfabrication 1997
High aspect ratio etching in polymer for microactuator applications
- - W.Y. Lee
  - J. Gao
  - et al.
- 1997
- SPIE Micromachining and Microfabrication 1997

Microfabrication by through-mask electrochemical micromachining