Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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1 result at TRANSDUCERS 2006

Evaluation of o₂ plasma and xef₂ vapor etch release processes for rf-mems switches fabricated using cmos interconnect technology
- - Christopher V. Jahnes
  - Nils Hoivik
  - et al.
- 2006
- TRANSDUCERS 2006