Publications

233 results at Proceedings of SPIE 1989

Chromium mask damage in excimer laser projection processing
- - J.T.C. Yeh
- 1989
- Proceedings of SPIE 1989
Gel resist processing for submicron CMOS and bipolar circuits
- - K.E. Petrillo
  - M. Smyth
  - et al.
- 1989
- Proceedings of SPIE 1989
Critical issues in high density magnetic and optical data storage
- - Alan E. Bell
- 1989
- Proceedings of SPIE 1989
Practical characterization of 0.5 μm optical lithography
- - Donis G. Flagello
  - Andrew T. S. Pomerene
- 1989
- Proceedings of SPIE 1989
Zero-Misalignment lithographic process using a photoresist with wavelength-selected tone
- - William D. Hinsberg
  - Scott A. MacDonald
  - et al.
- 1989
- Proceedings of SPIE 1989
Using monolithic laser arrays for improved transmitter availability in com-puter data links
- - Richard J. S. Bates
- 1989
- Proceedings of SPIE 1989
Chemical and physical aspects of multilayer resist processing
- - J. Paraszczak
  - E. Babich
  - et al.
- 1989
- Proceedings of SPIE 1989
Sub-picosecond raman spectroscopy of semiconductors
- - J.C. Tsang
  - J.A. Kash
- 1989
- Proceedings of SPIE 1989
Soft vacuum pulsed electron beam processing of teflon and teflon-like films
- - J. Krishnaswamy
  - G.J. Collins
  - et al.
- 1989
- Proceedings of SPIE 1989
Enhancement of the reflectivity of multilayer x-ray mirrors by ion polishing
- - Eberhard Spiller
- 1989
- Proceedings of SPIE 1989