Publications

509 results at JES

The Use of Gas Monitors to Characterize a Low-Temperature Atmospheric-Pressure Epitaxial System
- - Paul D. Agnello
  - Thomas O. Sedgwick
- 2019
- JES
In Situ Scanning Tunneling Microscopy of Copper Deposition with Benzotriazole
- - Rolf H. Muller
- 2019
- JES
A Two-Dimensional Process Model for Chemimechanical Polish Planarization
- - J. Warnock
- 2019
- JES
Reactive ion Etching of Silicon and Silicon Dioxide in CF₄ Plasmas Containing H₂ or C₂F₄ Additives
- - J.P. Simko
- 2019
- JES
A Study of Luminescent Centers in Reactive-Ion-Etched Silicon
- - T.D. Bestwick
  - G.S. Oehrlein
  - et al.
- 2019
- JES
Copper Corrosion with and without Inhibitors
- - V. Brusic
  - M.A. Frisch
  - et al.
- 2019
- JES
The Effects of Pressure, Temperature, and Time on the Annealing of lonizing Radiation Induced Insulator Damage in N-channel IGFET's
- - A. Reisman
  - C.J. Merz
- 2019
- JES
Mechanisms of Electroless Metal Plating: I. Application of the Mixed Potential Theory
- - Perminder Bindra
  - Judith Tweedie
- 2019
- JES
Removal of Fluorocarbon Residues on CF₄/H₂ Reactive-ion-Etched Silicon Surfaces Using a Hydrogen Plasma
- - J. Simko
  - G.S. Oehrlein
  - et al.
- 2019
- JES
Epitaxial Growth of GaAs with (C₂H₅)₂GaCl and AsH₃ in a Hotwall Reactor
- - T.F. Kuech
  - M.A. Tischler
  - et al.
- 2019
- JES