Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Mixed-metal-oxide planar optical waveguides
- - G. Arjavalingam
  - Michael A. Russak
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A process for improved Al (Cu) reactive ion etching
- - C.-K. Hu
  - B. Canney
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Structure of Cs on GaAs(110) as determined by scanning tunneling microscopy
- - P.N. First
  - R.A. Dragoset
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface characterization of the copper-epoxy adhesion interface from production printed circuit boards
- - P.C. Laberge
  - C. Miller
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Energetic particle bombardment of films during magnetron sputtering
- - S.M. Rossnage
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
TIN formed by ion beam nitriding of TiSi2
- - S.E. Harnstrarn
  - D. Moy
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A study of the chemical and physical interaction between copper and polyimide
- - D.Y. Shih
  - J. Paraszczak
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The angular dependence of preferential sputtering and composition in aluminum-copper thin films
- - P. Rudeck
  - J.M.E. Harper
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Optical emission in magnetrons: Nonlinear aspects
- - S.M. Rossnagel
  - K.L. Saenger
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The determination of structure in small supported metal particles by scanning transmission electron diffraction
- - H. Poppa
  - R.D. Moorhead
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films