Advanced single precursor based pSiCOH k = 2.4 for ULSI interconnects
- Deepika Priyadarshini
- Son Van Nguyen
- et al.
- 2017
- JVSTB
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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22 results at JVSTB
Impact of oxygen plasma on nitrided and annealed atomic layer deposited SiO2/high-k/metal gate for high-voltage input and output fin-shaped field effect transistor devices
- Shahab Siddiqui
- Min Dai
- et al.
- 2017
- JVSTB
Applications of clustering model to bimodal distributions for dielectric breakdown
- Ernest Y. Wu
- Ronald Bolam
- et al.
- 2017
- JVSTB
Large area three dimensional structure fabrication using multilayer electron beam lithography
- Ravi Bonam
- John G. Hartley
- 2016
- JVSTB
Materials characterization for multilayer electron beam lithography
- Ravi Bonam
- John G. Hartley
- 2016
- JVSTB
Study of alternate hardmasks for extreme ultraviolet patterning
- Anuja De Silva
- Indira Seshadri
- et al.
- 2016
- JVSTB
SIMS measurement of hydrogen and deuterium detection limits in silicon: Comparison of different SIMS instrumentation
- F.A. Stevie
- Chaunzhen Zhou
- et al.
- 2016
- JVSTB
PECVD low and ultralow dielectric constant materials: From invention and research to products
- Alfred Grill
- 2016
- JVSTB
Sub-20 nm silicon patterning and metal lift-off using thermal scanning probe lithography
- Heiko Wolf
- Colin D. Rawlings
- et al.
- 2015
- JVSTB
Optical properties of pseudomorphic Ge1-xSnx (x = 0 to 0.11) alloys on Ge(001)
- Manasa Medikonda
- Gangadhara R. Muthinti
- et al.
- 2014
- JVSTB